Part Number:810-069751-114
Brand:Lam Research
Module Type:Plasma Etch Module
Voltage Rating:240V
Frequency Range:50/60 Hz
Chamber Size:300mm
Process Gas Types:Cl2, O2, NF3
Etch Rate:100nm/min
Chuck Temperature Range:-5°C to 80°C
Power Output:1500W
Control Interface:Touchscreen
Communication Protocol:Ethernet/IP, Modbus TCP
Certifications:CE, UL, SEMI S2
The Lam Research 810-069751-114 is a cutting-edge semiconductor process module designed for high-precision manufacturing in the semiconductor industry. This module is engineered to deliver exceptional performance and reliability, making it an indispensable component for advanced semiconductor fabrication processes.
This high-precision semiconductor process module is built with robust materials, including high-grade stainless steel and ceramic, ensuring durability and longevity. Its compact design allows for easy integration into existing semiconductor equipment setups, enhancing efficiency and productivity.
The module operates within a wide range of frequencies, providing flexibility for various process requirements. With a certified operating voltage of 220V AC, it ensures stable and reliable performance under different conditions. The module is also compatible with multiple semiconductor equipment, making it a versatile choice for diverse applications.
Certified with ISO 9001, CE, and UL standards, the Lam Research 810-069751-114 meets stringent quality and safety requirements. Its precise engineering ensures consistent and accurate results, making it ideal for demanding semiconductor manufacturing processes.
Designed for ease of use, this semiconductor process module comes with comprehensive documentation and support services, allowing for seamless installation and operation. Whether you’re upgrading existing equipment or setting up new facilities, the Lam Research 810-069751-114 is a reliable and efficient solution.
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